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Effect of Substrate Temperature on Properties of ZnO Thin Films by Magnetron Sputtering
Effect of Substrate Temperature on Properties of ZnO Thin Films by Magnetron Sputtering
Effect of Substrate Temperature on Properties of ZnO Thin Films by Magnetron Sputtering
Zhou, M.-f. (author) / Song, X.-p. (author) / Sun, Z.-q. (author)
MATERIALS SCIENCE AND ENGINEERING -HANGZHOU- ; 25 ; 598-601
2007-01-01
4 pages
Article (Journal)
Unknown
DDC:
620.11
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