Initial growth of intrinsic microcrystalline silicon thin film: Dependence on pre-hydrogen glow discharge and substrate surface morphology: Fid-Bau Portal

Initial growth of intrinsic microcrystalline silicon thin film: Dependence on pre-hydrogen glow discharge and substrate surface morphology

Zhang, X. / Zheng, X. / Wang, G. / Zhao, Y.

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Initial growth of intrinsic microcrystalline silicon thin film: Dependence on pre-hydrogen glow discharge and substrate surface morphology

Zhang, X. / Zheng, X. / Wang, G. / Zhao, Y.

Initial growth of intrinsic microcrystalline silicon thin film: Dependence on pre-hydrogen glow discharge and substrate surface morphology

Zhang, X. / Zheng, X. / Wang, G. / Zhao, Y.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Initial growth of intrinsic microcrystalline silicon thin film: Dependence on pre-hydrogen glow discharge and substrate surface morphology

Contributors:

Zhang, X. (author) / Zheng, X. (author) / Wang, G. (author) / Zhao, Y. (author)

Published in:

APPLIED SURFACE SCIENCE ; 257 ; 3014-3019

Publication date:

2011-01-01

Size:

6 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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