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    Metal Assisted Chemical Etching of Silicon: A Review

    New search for: Huang, Z.
    New search for: Geyer, N.
    New search for: Werner, P.
    New search for: de Boor, J.
    New search for: G sele, U.

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    Metal Assisted Chemical Etching of Silicon: A Review

    New search for: Huang, Z.
    New search for: Geyer, N.
    New search for: Werner, P.
    New search for: de Boor, J.
    New search for: G sele, U.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Metal Assisted Chemical Etching of Silicon: A Review

    New search for: Huang, Z.
    New search for: Geyer, N.
    New search for: Werner, P.
    New search for: de Boor, J.
    New search for: G sele, U.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

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    Document information
    Title:

    Metal Assisted Chemical Etching of Silicon: A Review

    Contributors:

    Huang, Z. (author) / Geyer, N. (author) / Werner, P. (author) / de Boor, J. (author) / G sele, U. (author)

    Published in:

    ADVANCED MATERIALS -DEERFIELD BEACH THEN WEINHEIM- ; 23 ; 285-308

    Publication date:

    2011-01-01

    Size:

    24 pages

    ISSN:

    0935-9648

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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