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    Micromachined thermoelectric IR sensors fabricated by a self-aligned process

    New search for: Xu, D.
    New search for: Xiong, B.
    New search for: Wang, Y.

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    Micromachined thermoelectric IR sensors fabricated by a self-aligned process

    New search for: Xu, D.
    New search for: Xiong, B.
    New search for: Wang, Y.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Micromachined thermoelectric IR sensors fabricated by a self-aligned process

    New search for: Xu, D.
    New search for: Xiong, B.
    New search for: Wang, Y.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Micromachined thermoelectric IR sensors fabricated by a self-aligned process

    Contributors:

    Xu, D. (author) / Xiong, B. (author) / Wang, Y. (author)

    Published in:

    SMART MATERIALS AND STRUCTURES ; 20 ; 015013

    Publication date:

    2011-01-01

    Size:

    15013 pages

    ISSN:

    0964-1726

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  530

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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