Self assembled micro masking effect in the fabrication of SiC nanopillars by ICP-RIE dry etching: Fid-Bau Portal

Self assembled micro masking effect in the fabrication of SiC nanopillars by ICP-RIE dry etching

Kathalingam, A. / Kim, M. R. / Chae, Y. S. / Sudhakar, S. / Mahalingam, T. / Rhee, J. K.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Self assembled micro masking effect in the fabrication of SiC nanopillars by ICP-RIE dry etching

Kathalingam, A. / Kim, M. R. / Chae, Y. S. / Sudhakar, S. / Mahalingam, T. / Rhee, J. K.

Self assembled micro masking effect in the fabrication of SiC nanopillars by ICP-RIE dry etching

Kathalingam, A. / Kim, M. R. / Chae, Y. S. / Sudhakar, S. / Mahalingam, T. / Rhee, J. K.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

Self assembled micro masking effect in the fabrication of SiC nanopillars by ICP-RIE dry etching

Contributors:

Kathalingam, A. (author) / Kim, M. R. (author) / Chae, Y. S. (author) / Sudhakar, S. (author) / Mahalingam, T. (author) / Rhee, J. K. (author)

Published in:

APPLIED SURFACE SCIENCE ; 257 ; 3850-3855

Publication date:

2011-01-01

Size:

6 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

Liao, Y. X. / Liu, J. / Wang, B. et al. | British Library Online Contents | 2012

Fabrication and reflection properties of silicon nanopillars by cesium chloride self-assembly and dry etching

Liu, J. / Ashmkhan, M. / Wang, B. et al. | British Library Online Contents | 2012

Fabrication of silica nanopillars by templated etching using bimetallic nanoparticles for anti-reflection applications

Kumar, Krishna / Swaminathan, P. | British Library Online Contents | 2018

Multiform structures with silicon nanopillars by cesium chloride self-assembly and dry etching

Liao, Y. x. / Liu, J. / Wang, B. et al. | British Library Online Contents | 2011

Fabrication of silicon nanopillars using self-organized gold-chromium mask

Ovchinnikov, V. / Malinin, A. / Novikov, S. et al. | British Library Online Contents | 2000