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Properties of a-Si:H films deposited by RF magnetron sputtering at 95^oC
Properties of a-Si:H films deposited by RF magnetron sputtering at 95^oC
Properties of a-Si:H films deposited by RF magnetron sputtering at 95^oC
Girginoudi, D. (author) / Tsiarapas, C. (author) / Georgoulas, N. (author)
APPLIED SURFACE SCIENCE ; 257 ; 3898-3903
2011-01-01
6 pages
Article (Journal)
English
DDC:
621.35
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