Emergence of (001) preferred orientation in AIN film using ultrathin intermediate Pt layer: Fid-Bau Portal

Emergence of (001) preferred orientation in AIN film using ultrathin intermediate Pt layer

Harumoto, T. / Muraishi, S. / Shi, J. / Nakamura, Y.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Emergence of (001) preferred orientation in AIN film using ultrathin intermediate Pt layer

Harumoto, T. / Muraishi, S. / Shi, J. / Nakamura, Y.

Emergence of (001) preferred orientation in AIN film using ultrathin intermediate Pt layer

Harumoto, T. / Muraishi, S. / Shi, J. / Nakamura, Y.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

Emergence of (001) preferred orientation in AIN film using ultrathin intermediate Pt layer

Contributors:

Harumoto, T. (author) / Muraishi, S. (author) / Shi, J. (author) / Nakamura, Y. (author)

Published in:

Reactive Sputter Deposition ; 32-34

MATERIALS TECHNOLOGY ; 26

Publication date:

2011-01-01

Size:

3 pages

ISSN:

1066-7857

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

Ko Park, S. H. / Lee, Y. E. | British Library Online Contents | 2004

Preferred orientation in PbZrO3 thin film prepared by sol-gel technique

Bae, S. H. / Jeon, K. B. / Jin, B. | British Library Online Contents | 2000

Microstructure and preferred orientation in rf sputter deposited AIN thin film

Fujiki, M. / Takahashi, M. / Kikkawa, S. et al. | British Library Online Contents | 2000

Two critical thicknesses in the preferred orientation of TiN thin film

Oh, U. C. / Jung Ho Je / Lee, J. Y. | British Library Online Contents | 1998

Preferred Orientation Analysis in Textured Materials

Bunge, H. J. | British Library Online Contents | 1993