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Molecular dynamics study on the effects of stamp shape, adhesive energy, and temperature on the nanoimprint lithography process
Molecular dynamics study on the effects of stamp shape, adhesive energy, and temperature on the nanoimprint lithography process
Molecular dynamics study on the effects of stamp shape, adhesive energy, and temperature on the nanoimprint lithography process
Kang, J. H. (author) / Kim, K. S. (author) / Kim, K. W. (author)
APPLIED SURFACE SCIENCE ; 257 ; 1562-1572
2010-01-01
11 pages
Article (Journal)
English
DDC:
621.35
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