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Molecular dynamics study on the effects of stamp shape, adhesive energy, and temperature on the nanoimprint lithography process

Kang, J. H. / Kim, K. S. / Kim, K. W.

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Molecular dynamics study on the effects of stamp shape, adhesive energy, and temperature on the nanoimprint lithography process

Kang, J. H. / Kim, K. S. / Kim, K. W.

Molecular dynamics study on the effects of stamp shape, adhesive energy, and temperature on the nanoimprint lithography process

Kang, J. H. / Kim, K. S. / Kim, K. W.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Molecular dynamics study on the effects of stamp shape, adhesive energy, and temperature on the nanoimprint lithography process

Contributors:

Kang, J. H. (author) / Kim, K. S. (author) / Kim, K. W. (author)

Published in:

APPLIED SURFACE SCIENCE ; 257 ; 1562-1572

Publication date:

2010-01-01

Size:

11 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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