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    Dynamic behavior of a new surface-micromachined piezoelectric material actuated micro-mirror device

    New search for: Matin, M. A.
    New search for: Akai, D.
    New search for: Ozaki, K.
    New search for: Kawazu, N.
    New search for: Hanebuchi, M.
    New search for: Sawada, K.
    New search for: Ishida, M.

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    Dynamic behavior of a new surface-micromachined piezoelectric material actuated micro-mirror device

    New search for: Matin, M. A.
    New search for: Akai, D.
    New search for: Ozaki, K.
    New search for: Kawazu, N.
    New search for: Hanebuchi, M.
    New search for: Sawada, K.
    New search for: Ishida, M.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Dynamic behavior of a new surface-micromachined piezoelectric material actuated micro-mirror device

    New search for: Matin, M. A.
    New search for: Akai, D.
    New search for: Ozaki, K.
    New search for: Kawazu, N.
    New search for: Hanebuchi, M.
    New search for: Sawada, K.
    New search for: Ishida, M.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

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    Document information
    Title:

    Dynamic behavior of a new surface-micromachined piezoelectric material actuated micro-mirror device

    Contributors:

    Matin, M. A. (author) / Akai, D. (author) / Ozaki, K. (author) / Kawazu, N. (author) / Hanebuchi, M. (author) / Sawada, K. (author) / Ishida, M. (author)

    Published in:

    COMPUTATIONAL MATERIALS SCIENCE ; 50 ; 2311-2318

    Publication date:

    2011-01-01

    Size:

    8 pages

    ISSN:

    0927-0256

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.1 / 510

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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