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Design and vibration analysis of a piezoelectric-actuated MEMS scanning mirror and its application to laser projection
Design and vibration analysis of a piezoelectric-actuated MEMS scanning mirror and its application to laser projection
Design and vibration analysis of a piezoelectric-actuated MEMS scanning mirror and its application to laser projection
Chen, C.-D. (author) / Lee, Y.-H. (author) / Yeh, C.-S. (author)
SMART MATERIALS AND STRUCTURES ; 23 ; 125007
2014-01-01
125007 pages
Article (Journal)
English
DDC:
530
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