Polycrystalline TiO~2 Thin Films with Different Thicknesses Deposited on Unheated Substrates Using RF Magnetron Sputtering: Fid-Bau Portal

Polycrystalline TiO~2 Thin Films with Different Thicknesses Deposited on Unheated Substrates Using RF Magnetron Sputtering

Wei, C.-H. / Chang, C.-M.

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Polycrystalline TiO~2 Thin Films with Different Thicknesses Deposited on Unheated Substrates Using RF Magnetron Sputtering

Wei, C.-H. / Chang, C.-M.

Polycrystalline TiO~2 Thin Films with Different Thicknesses Deposited on Unheated Substrates Using RF Magnetron Sputtering

Wei, C.-H. / Chang, C.-M.

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Order at Subito €

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Document information

Title:

Polycrystalline TiO~2 Thin Films with Different Thicknesses Deposited on Unheated Substrates Using RF Magnetron Sputtering

Contributors:

Wei, C.-H. (author) / Chang, C.-M. (author)

Published in:

New Trends for Micro- and Nano Analyses ; 554-559

MATERIALS TRANSACTIONS ; 52

Publication date:

2011-01-01

Size:

6 pages

ISSN:

1345-9678

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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