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    Crystal orientation control of polycrystalline TiN thin films using ZnO under layers deposited by magnetron sputtering

    New search for: Kato, K.
    New search for: Omoto, H.
    New search for: Takamatsu, A.
    New search for: Tomioka, T.

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    Crystal orientation control of polycrystalline TiN thin films using ZnO under layers deposited by magnetron sputtering

    New search for: Kato, K.
    New search for: Omoto, H.
    New search for: Takamatsu, A.
    New search for: Tomioka, T.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Crystal orientation control of polycrystalline TiN thin films using ZnO under layers deposited by magnetron sputtering

    New search for: Kato, K.
    New search for: Omoto, H.
    New search for: Takamatsu, A.
    New search for: Tomioka, T.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Crystal orientation control of polycrystalline TiN thin films using ZnO under layers deposited by magnetron sputtering

    Contributors:

    Kato, K. (author) / Omoto, H. (author) / Takamatsu, A. (author) / Tomioka, T. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 258 ; 687-694

    Publication date:

    2011-01-01

    Size:

    8 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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