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Nanomechanical characteristics of annealed Si/SiGe superlattices

Wu, M. J. / Wen, H. C. / Wu, S. C. / Yang, P. F. / Lai, Y. S. / Hsu, W. K. / Wu, W. F. / Chou, C. P.

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Nanomechanical characteristics of annealed Si/SiGe superlattices

Wu, M. J. / Wen, H. C. / Wu, S. C. / Yang, P. F. / Lai, Y. S. / Hsu, W. K. / Wu, W. F. / Chou, C. P.

Nanomechanical characteristics of annealed Si/SiGe superlattices

Wu, M. J. / Wen, H. C. / Wu, S. C. / Yang, P. F. / Lai, Y. S. / Hsu, W. K. / Wu, W. F. / Chou, C. P.

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Document information

Title:

Nanomechanical characteristics of annealed Si/SiGe superlattices

Contributors:

Wu, M. J. (author) / Wen, H. C. (author) / Wu, S. C. (author) / Yang, P. F. (author) / Lai, Y. S. (author) / Hsu, W. K. (author) / Wu, W. F. (author) / Chou, C. P. (author)

Published in:

APPLIED SURFACE SCIENCE ; 257 ; 8887-8893

Publication date:

2011-01-01

Size:

7 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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