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    Effect of strain relaxation of oxidation-treated SiGe epitaxial thin films and its nanomechanical characteristics

    New search for: He, B. C.
    New search for: Wen, H. C.
    New search for: Chinag, T. Y.
    New search for: Chang, Z. C.
    New search for: Lian, D.
    New search for: Yau, W. H.
    New search for: Wu, W. F.
    New search for: Chou, C. P.

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    Effect of strain relaxation of oxidation-treated SiGe epitaxial thin films and its nanomechanical characteristics

    New search for: He, B. C.
    New search for: Wen, H. C.
    New search for: Chinag, T. Y.
    New search for: Chang, Z. C.
    New search for: Lian, D.
    New search for: Yau, W. H.
    New search for: Wu, W. F.
    New search for: Chou, C. P.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Effect of strain relaxation of oxidation-treated SiGe epitaxial thin films and its nanomechanical characteristics

    New search for: He, B. C.
    New search for: Wen, H. C.
    New search for: Chinag, T. Y.
    New search for: Chang, Z. C.
    New search for: Lian, D.
    New search for: Yau, W. H.
    New search for: Wu, W. F.
    New search for: Chou, C. P.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Effect of strain relaxation of oxidation-treated SiGe epitaxial thin films and its nanomechanical characteristics

    Contributors:

    He, B. C. (author) / Wen, H. C. (author) / Chinag, T. Y. (author) / Chang, Z. C. (author) / Lian, D. (author) / Yau, W. H. (author) / Wu, W. F. (author) / Chou, C. P. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 256 ; 3299-3302

    Publication date:

    2010-01-01

    Size:

    4 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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