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Laser treatment of silicon at nitrogen ambient thermal stress analysis

Yilbas, B.S. / Arif, A.F.M. / Karatas, C.

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Laser treatment of silicon at nitrogen ambient thermal stress analysis

Yilbas, B.S. / Arif, A.F.M. / Karatas, C.

Laser treatment of silicon at nitrogen ambient thermal stress analysis

Yilbas, B.S. / Arif, A.F.M. / Karatas, C.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Laser treatment of silicon at nitrogen ambient thermal stress analysis

Contributors:

Yilbas, B.S. (author) / Arif, A.F.M. (author) / Karatas, C. (author)

Published in:

SURFACE ENGINEERING -LONDON- ; 27 ; 436-444

Publication date:

2011-01-01

Size:

9 pages

ISSN:

0267-0844

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.44

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