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    Microstructure and Wear-Resistant SiC Film by RF Magnetron Sputtering

    New search for: Tian, K.
    New search for: Xu, X.J.
    New search for: Fan, Z.
    New search for: Hao, X.N.
    New search for: Chen, D.
    New search for: Xin, X.L.
    New search for: Sheng, X.L.
    New search for: Li, C.
    New search for: Jiang, C.
    New search for: Zhong, Z.
    New search for: Zhou, Y.

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    Microstructure and Wear-Resistant SiC Film by RF Magnetron Sputtering

    New search for: Tian, K.
    New search for: Xu, X.J.
    New search for: Fan, Z.
    New search for: Hao, X.N.
    New search for: Chen, D.
    New search for: Xin, X.L.
    New search for: Sheng, X.L.
    New search for: Li, C.
    New search for: Jiang, C.
    New search for: Zhong, Z.
    New search for: Zhou, Y.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Microstructure and Wear-Resistant SiC Film by RF Magnetron Sputtering

    New search for: Tian, K.
    New search for: Xu, X.J.
    New search for: Fan, Z.
    New search for: Hao, X.N.
    New search for: Chen, D.
    New search for: Xin, X.L.
    New search for: Sheng, X.L.
    New search for: Li, C.
    New search for: Jiang, C.
    New search for: Zhong, Z.
    New search for: Zhou, Y.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
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    Document information
    Title:

    Microstructure and Wear-Resistant SiC Film by RF Magnetron Sputtering

    Contributors:

    Tian, K. (author) / Xu, X.J. (author) / Fan, Z. (author) / Hao, X.N. (author) / Chen, D. (author) / Xin, X.L. (author) / Sheng, X.L. (author) / Li, C. / Jiang, C. / Zhong, Z.

    Published in:

    Functional and Electronic Materials ; 580-584

    MATERIALS SCIENCE FORUM ; 687

    Publication date:

    2011-01-01

    Size:

    5 pages

    ISSN:

    0255-5476

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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