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    Optical emission, electron temperature, and microstructure of Cu film prepared by magnetron sputtering

    New search for: Zhao, Q. X.
    New search for: Bian, F.
    New search for: Zhou, Y.
    New search for: Gao, Y. F.
    New search for: Wang, S. B.
    New search for: Ma, L.
    New search for: Yan, Z.
    New search for: Liu, B. T.

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    Optical emission, electron temperature, and microstructure of Cu film prepared by magnetron sputtering

    New search for: Zhao, Q. X.
    New search for: Bian, F.
    New search for: Zhou, Y.
    New search for: Gao, Y. F.
    New search for: Wang, S. B.
    New search for: Ma, L.
    New search for: Yan, Z.
    New search for: Liu, B. T.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Optical emission, electron temperature, and microstructure of Cu film prepared by magnetron sputtering

    New search for: Zhao, Q. X.
    New search for: Bian, F.
    New search for: Zhou, Y.
    New search for: Gao, Y. F.
    New search for: Wang, S. B.
    New search for: Ma, L.
    New search for: Yan, Z.
    New search for: Liu, B. T.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Optical emission, electron temperature, and microstructure of Cu film prepared by magnetron sputtering

    Contributors:

    Zhao, Q. X. (author) / Bian, F. (author) / Zhou, Y. (author) / Gao, Y. F. (author) / Wang, S. B. (author) / Ma, L. (author) / Yan, Z. (author) / Liu, B. T. (author)

    Published in:

    MATERIALS LETTERS ; 62 ; 4140-4142

    Publication date:

    2008-01-01

    Size:

    3 pages

    ISSN:

    0167-577X

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.1105 / 530

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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