Study of Under Etching Characters of Si (100) in Surfactant Added TMAH: Fid-Bau Portal

Study of Under Etching Characters of Si (100) in Surfactant Added TMAH

Hu, Q.F. / Gao, C.C. / Hao, Y.L. / Zhang, Y.X.

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Study of Under Etching Characters of Si (100) in Surfactant Added TMAH

Hu, Q.F. / Gao, C.C. / Hao, Y.L. / Zhang, Y.X.

Study of Under Etching Characters of Si (100) in Surfactant Added TMAH

Hu, Q.F. / Gao, C.C. / Hao, Y.L. / Zhang, Y.X.

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Document information

Title:

Study of Under Etching Characters of Si (100) in Surfactant Added TMAH

Contributors:

Hu, Q.F. (author) / Gao, C.C. (author) / Hao, Y.L. (author) / Zhang, Y.X. (author)

Published in:

KEY ENGINEERING MATERIALS ; 483 ; 34-37

Publication date:

2011-01-01

Size:

4 pages

ISSN:

1013-9826

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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