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A Silicon Micro-Accelerometer with Triangle Cross-Section Beam by Anisotropic Wet Etching in TMAH Solution

Lv, Y. / Cui, H.J. / Dong, P.T. / Chen, Z.H. / Wu, X.Z.

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A Silicon Micro-Accelerometer with Triangle Cross-Section Beam by Anisotropic Wet Etching in TMAH Solution

Lv, Y. / Cui, H.J. / Dong, P.T. / Chen, Z.H. / Wu, X.Z.

A Silicon Micro-Accelerometer with Triangle Cross-Section Beam by Anisotropic Wet Etching in TMAH Solution

Lv, Y. / Cui, H.J. / Dong, P.T. / Chen, Z.H. / Wu, X.Z.

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Check availability in my library

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Title:

A Silicon Micro-Accelerometer with Triangle Cross-Section Beam by Anisotropic Wet Etching in TMAH Solution

Contributors:

Lv, Y. (author) / Cui, H.J. (author) / Dong, P.T. (author) / Chen, Z.H. (author) / Wu, X.Z. (author) / Wang, X.

Published in:

Micro-Nano Technology XIII Selected, peer reviewed papers from the 13th Annual Conference of Chinese Society of Micro-Nano Technology, September 28-30, 2011, Changchow, China ; 151-155

KEY ENGINEERING MATERIALS ; 503

Publication date:

2012-01-01

Size:

5 pages

ISSN:

1013-9826

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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