Effect of Residual Stresses on a Micromachined Z-Axis Vibrating Rate Gyroscope: Fid-Bau Portal

Effect of Residual Stresses on a Micromachined Z-Axis Vibrating Rate Gyroscope

Qiu, A. P. / Su, Y. / Wang, S. R. / Zhou, B. L.

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Effect of Residual Stresses on a Micromachined Z-Axis Vibrating Rate Gyroscope

Qiu, A. P. / Su, Y. / Wang, S. R. / Zhou, B. L.

Effect of Residual Stresses on a Micromachined Z-Axis Vibrating Rate Gyroscope

Qiu, A. P. / Su, Y. / Wang, S. R. / Zhou, B. L.

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Order at Subito €

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Document information

Title:

Effect of Residual Stresses on a Micromachined Z-Axis Vibrating Rate Gyroscope

Contributors:

Qiu, A. P. (author) / Su, Y. (author) / Wang, S. R. (author) / Zhou, B. L. (author) / Gao, Y. / Tse, S. / Gao, W.

Published in:

Measurement Technology and Intelligent Instruments VI ; 101-106

KEY ENGINEERING MATERIALS ; 295/296

Publication date:

2005-01-01

Size:

6 pages

ISSN:

1013-9826

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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