Structure Design, Fabrication and Characteristics of Polysilicon Nano-Thin Films Resistances Pressure Sensor Based on MEMS Technology: Fid-Bau Portal

Structure Design, Fabrication and Characteristics of Polysilicon Nano-Thin Films Resistances Pressure Sensor Based on MEMS Technology

Zhao, X.F. / Wen, D.Z. / Li, Y. / Hou, Y.X. / Ai, C.P. / Wang, Z.Q. / Xiu, D.J.

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Structure Design, Fabrication and Characteristics of Polysilicon Nano-Thin Films Resistances Pressure Sensor Based on MEMS Technology

Zhao, X.F. / Wen, D.Z. / Li, Y. / Hou, Y.X. / Ai, C.P. / Wang, Z.Q. / Xiu, D.J.

Structure Design, Fabrication and Characteristics of Polysilicon Nano-Thin Films Resistances Pressure Sensor Based on MEMS Technology

Zhao, X.F. / Wen, D.Z. / Li, Y. / Hou, Y.X. / Ai, C.P. / Wang, Z.Q. / Xiu, D.J.

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Title:

Structure Design, Fabrication and Characteristics of Polysilicon Nano-Thin Films Resistances Pressure Sensor Based on MEMS Technology

Contributors:

Zhao, X.F. (author) / Wen, D.Z. (author) / Li, Y. (author) / Hou, Y.X. (author) / Ai, C.P. (author) / Wang, Z.Q. (author) / Xiu, D.J. (author)

Published in:

KEY ENGINEERING MATERIALS ; 483 ; 200-205

Publication date:

2011-01-01

Size:

6 pages

ISSN:

1013-9826

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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