Modeling of fatigue in polysilicon MEMS structures: Fid-Bau Portal

Modeling of fatigue in polysilicon MEMS structures

Bhalerao, K. / Soboyejo, A. B. / Soboyejo, W. O.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Modeling of fatigue in polysilicon MEMS structures

Bhalerao, K. / Soboyejo, A. B. / Soboyejo, W. O.

Modeling of fatigue in polysilicon MEMS structures

Bhalerao, K. / Soboyejo, A. B. / Soboyejo, W. O.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

Modeling of fatigue in polysilicon MEMS structures

Contributors:

Bhalerao, K. (author) / Soboyejo, A. B. (author) / Soboyejo, W. O. (author)

Published in:

JOURNAL OF MATERIALS SCIENCE ; 38 ; 4157-4161

Publication date:

2003-01-01

Size:

5 pages

ISSN:

0022-2461

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

Soboyejo, A. B. / Bhalerao, K. D. / Soboyejo, W. O. | British Library Online Contents | 2003

On the evolution of surface morphology of polysilicon MEMS structures during fatigue

Shrotriya, P. / Allameh, S. M. / Soboyejo, W. O. | British Library Online Contents | 2004

Thermal cycling response of layered gold/polysilicon MEMS structures

Gall, K. / Dunn, M. L. / Zhang, Y. et al. | British Library Online Contents | 2004

Fatigue testing of polysilicon--a review

Sharpe Jr, W. N. / Bagdahn, J. | British Library Online Contents | 2004

Mode I and mixed mode fracture of polysilicon for MEMS:

CHO, S. W. / JONNALAGADDA, K. / CHASIOTIS, I. | British Library Online Contents | 2007