Structure Design, Fabrication and Characteristics of Polysilicon Nano-Thin Films Resistances Pressure Sensor Based on MEMS Technology: Fid-Bau Portal

Structure Design, Fabrication and Characteristics of Polysilicon Nano-Thin Films Resistances Pressure Sensor Based on MEMS Technology

Zhao, X.F. / Wen, D.Z. / Li, Y. / Hou, Y.X. / Ai, C.P. / Wang, Z.Q. / Xiu, D.J.

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Structure Design, Fabrication and Characteristics of Polysilicon Nano-Thin Films Resistances Pressure Sensor Based on MEMS Technology

Zhao, X.F. / Wen, D.Z. / Li, Y. / Hou, Y.X. / Ai, C.P. / Wang, Z.Q. / Xiu, D.J.

Structure Design, Fabrication and Characteristics of Polysilicon Nano-Thin Films Resistances Pressure Sensor Based on MEMS Technology

Zhao, X.F. / Wen, D.Z. / Li, Y. / Hou, Y.X. / Ai, C.P. / Wang, Z.Q. / Xiu, D.J.

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Titel:

Structure Design, Fabrication and Characteristics of Polysilicon Nano-Thin Films Resistances Pressure Sensor Based on MEMS Technology

Beteiligte:

Zhao, X.F. (Autor:in) / Wen, D.Z. (Autor:in) / Li, Y. (Autor:in) / Hou, Y.X. (Autor:in) / Ai, C.P. (Autor:in) / Wang, Z.Q. (Autor:in) / Xiu, D.J. (Autor:in)

Erschienen in:

KEY ENGINEERING MATERIALS ; 483 ; 200-205

Erscheinungsdatum:

01.01.2011

Format / Umfang:

6 pages

ISSN:

1013-9826

Medientyp:

Aufsatz (Zeitschrift)

Format:

Sprache:

Englisch

Klassifikation:

DDC: 620.11

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Zhuang, C.C. / Zhao, X.F. / Song, Y. et al. | British Library Online Contents | 2014

Micro/nanotribological studies of polysilicon and SiC films for MEMS applications

Sundararajan, S. / Bhushan, B. | British Library Online Contents | 1998

Modeling of fatigue in polysilicon MEMS structures

Bhalerao, K. / Soboyejo, A. B. / Soboyejo, W. O. | British Library Online Contents | 2003

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