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    The Vibration Pickup of Micro-Pump Diaphragm Based on MEMS Technology Design

    New search for: Li, G.
    New search for: Li, L.
    New search for: Zhao, X.F.
    New search for: Wen, D.Z.
    New search for: Yu, Y.
    New search for: Tang, F.

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    The Vibration Pickup of Micro-Pump Diaphragm Based on MEMS Technology Design

    New search for: Li, G.
    New search for: Li, L.
    New search for: Zhao, X.F.
    New search for: Wen, D.Z.
    New search for: Yu, Y.
    New search for: Tang, F.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    The Vibration Pickup of Micro-Pump Diaphragm Based on MEMS Technology Design

    New search for: Li, G.
    New search for: Li, L.
    New search for: Zhao, X.F.
    New search for: Wen, D.Z.
    New search for: Yu, Y.
    New search for: Tang, F.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

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    Document information
    Title:

    The Vibration Pickup of Micro-Pump Diaphragm Based on MEMS Technology Design

    Contributors:

    Li, G. (author) / Li, L. (author) / Zhao, X.F. (author) / Wen, D.Z. (author) / Yu, Y. (author) / Tang, F.

    Published in:

    MICRO-NANO TECHNOLOGY XV ; 837-841

    KEY ENGINEERING MATERIALS ; 609/610

    Publication date:

    2014-01-01

    Size:

    5 pages

    ISSN:

    1013-9826

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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