A Laterally Thermally-Actuated RF MEMS Capacitive Switch with Parylene as Dielectric Layer: Fid-Bau Portal

A Laterally Thermally-Actuated RF MEMS Capacitive Switch with Parylene as Dielectric Layer

He, X.J. / Lv, Z.Q. / Liu, B. / Li, Z.H.

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A Laterally Thermally-Actuated RF MEMS Capacitive Switch with Parylene as Dielectric Layer

He, X.J. / Lv, Z.Q. / Liu, B. / Li, Z.H.

A Laterally Thermally-Actuated RF MEMS Capacitive Switch with Parylene as Dielectric Layer

He, X.J. / Lv, Z.Q. / Liu, B. / Li, Z.H.

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Document information

Title:

A Laterally Thermally-Actuated RF MEMS Capacitive Switch with Parylene as Dielectric Layer

Contributors:

He, X.J. (author) / Lv, Z.Q. (author) / Liu, B. (author) / Li, Z.H. (author)

Published in:

KEY ENGINEERING MATERIALS ; 483 ; 392-395

Publication date:

2011-01-01

Size:

4 pages

ISSN:

1013-9826

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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