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Fabrication and Performance of Piezoelectric MEMS Generators Using Bulk PZT Films

Tang, G. / Liu, J.Q. / Liu, H.S. / Li, Y.G. / Yang, C.S. / He, D.N.

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Fabrication and Performance of Piezoelectric MEMS Generators Using Bulk PZT Films

Tang, G. / Liu, J.Q. / Liu, H.S. / Li, Y.G. / Yang, C.S. / He, D.N.

Fabrication and Performance of Piezoelectric MEMS Generators Using Bulk PZT Films

Tang, G. / Liu, J.Q. / Liu, H.S. / Li, Y.G. / Yang, C.S. / He, D.N.

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Check availability in my library

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Document information

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Document information

Title:

Fabrication and Performance of Piezoelectric MEMS Generators Using Bulk PZT Films

Contributors:

Tang, G. (author) / Liu, J.Q. (author) / Liu, H.S. (author) / Li, Y.G. (author) / Yang, C.S. (author) / He, D.N. (author)

Published in:

KEY ENGINEERING MATERIALS ; 483 ; 607-610

Publication date:

2011-01-01

Size:

4 pages

ISSN:

1013-9826

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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