Fabrication of Piezoelectric Ultrathin Films for MEMs and Sensors by the Electrostatic Self-Assembly Process: Fid-Bau Portal

Fabrication of Piezoelectric Ultrathin Films for MEMs and Sensors by the Electrostatic Self-Assembly Process

Zeng, T. / Du, W. / Zhang, F. / Rosidian, A. / Claus, R. O. / Liu, Y. / Cooper, K. L.

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Fabrication of Piezoelectric Ultrathin Films for MEMs and Sensors by the Electrostatic Self-Assembly Process

Zeng, T. / Du, W. / Zhang, F. / Rosidian, A. / Claus, R. O. / Liu, Y. / Cooper, K. L.

Fabrication of Piezoelectric Ultrathin Films for MEMs and Sensors by the Electrostatic Self-Assembly Process

Zeng, T. / Du, W. / Zhang, F. / Rosidian, A. / Claus, R. O. / Liu, Y. / Cooper, K. L.

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Title:

Fabrication of Piezoelectric Ultrathin Films for MEMs and Sensors by the Electrostatic Self-Assembly Process

Contributors:

Zeng, T. (author) / Du, W. (author) / Zhang, F. (author) / Rosidian, A. (author) / Claus, R. O. (author) / Liu, Y. (author) / Cooper, K. L. (author) / Chang, F.-K.

Conference:

International workshop; 2nd, Structural health monitoring ; 1999 ; Stanford, CA

Published in:

Structural health monitoring ; 625-634

Publication date:

1999-01-01

Size:

10 pages

ISBN:

1566768810

Type of media:

Conference paper

Type of material:

Language:

English

Keywords:

structural health monitoring

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