Structure of Cu-W Thin Films Deposited by Magnetron Sputtering: Fid-Bau Portal

Structure of Cu-W Thin Films Deposited by Magnetron Sputtering

Wang, R. / Zhou, L.-p. / Wang, M.-p. / Zhu, J.-j. / Li, D.-y. / Li, S.-l.

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Structure of Cu-W Thin Films Deposited by Magnetron Sputtering

Wang, R. / Zhou, L.-p. / Wang, M.-p. / Zhu, J.-j. / Li, D.-y. / Li, S.-l.

Structure of Cu-W Thin Films Deposited by Magnetron Sputtering

Wang, R. / Zhou, L.-p. / Wang, M.-p. / Zhu, J.-j. / Li, D.-y. / Li, S.-l.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Structure of Cu-W Thin Films Deposited by Magnetron Sputtering

Contributors:

Wang, R. (author) / Zhou, L.-p. (author) / Wang, M.-p. (author) / Zhu, J.-j. (author) / Li, D.-y. (author) / Li, S.-l. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING -HANGZHOU- ; 26 ; 582-584

Publication date:

2008-01-01

Size:

3 pages

ISSN:

1673-2812

Type of media:

Article (Journal)

Type of material:

Language:

Unknown

Classification:

DDC: 620.11

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