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Wafer-level fabrication and optical characterization of nanoscale patterned sapphire substrates

Lin, Y. S. / Hsu, W. C. / Huang, K. C. / Yeh, J. A.

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Wafer-level fabrication and optical characterization of nanoscale patterned sapphire substrates

Lin, Y. S. / Hsu, W. C. / Huang, K. C. / Yeh, J. A.

Wafer-level fabrication and optical characterization of nanoscale patterned sapphire substrates

Lin, Y. S. / Hsu, W. C. / Huang, K. C. / Yeh, J. A.

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Check availability in my library

Order at Subito €

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Document information

Title:

Wafer-level fabrication and optical characterization of nanoscale patterned sapphire substrates

Contributors:

Lin, Y. S. (author) / Hsu, W. C. (author) / Huang, K. C. (author) / Yeh, J. A. (author)

Published in:

APPLIED SURFACE SCIENCE ; 258 ; 2-6

Publication date:

2011-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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