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Significant reduction of AlN wafer bowing grown on sapphire substrate with patterned graphene oxide
Significant reduction of AlN wafer bowing grown on sapphire substrate with patterned graphene oxide
Significant reduction of AlN wafer bowing grown on sapphire substrate with patterned graphene oxide
Jin, Joo (author) / Cuong, Tran Viet (author) / Han, Min (author) / Ryu, Beo Deul (author) / Kang, Ko Ku (author) / Hong, Chang-Hee (author)
MATERIALS LETTERS ; 160 ; 496-499
2015-01-01
4 pages
Article (Journal)
Unknown
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Wafer-level fabrication and optical characterization of nanoscale patterned sapphire substrates
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