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    Surface modification and fabrication of 3D nanostructures by atomic layer deposition

    New search for: Bae, C.
    New search for: Shin, H.
    New search for: Nielsch, K.

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    Surface modification and fabrication of 3D nanostructures by atomic layer deposition

    New search for: Bae, C.
    New search for: Shin, H.
    New search for: Nielsch, K.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Surface modification and fabrication of 3D nanostructures by atomic layer deposition

    New search for: Bae, C.
    New search for: Shin, H.
    New search for: Nielsch, K.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Surface modification and fabrication of 3D nanostructures by atomic layer deposition

    Contributors:

    Bae, C. (author) / Shin, H. (author) / Nielsch, K. (author)

    Published in:

    MRS BULLETIN- MATERIALS RESEARCH SOCIETY ; 36 ; 887-898

    Publication date:

    2011-01-01

    Size:

    12 pages

    ISSN:

    0883-7694

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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