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Replacing diamond cutting tools with CBN for efficient nanometric cutting of silicon

Goel, S. / Luo, X. / Reuben, R. L. / Rashid, W. B.

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Replacing diamond cutting tools with CBN for efficient nanometric cutting of silicon

Goel, S. / Luo, X. / Reuben, R. L. / Rashid, W. B.

Replacing diamond cutting tools with CBN for efficient nanometric cutting of silicon

Goel, S. / Luo, X. / Reuben, R. L. / Rashid, W. B.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Replacing diamond cutting tools with CBN for efficient nanometric cutting of silicon

Contributors:

Goel, S. (author) / Luo, X. (author) / Reuben, R. L. (author) / Rashid, W. B. (author)

Published in:

MATERIALS LETTERS ; 68 ; 507-509

Publication date:

2012-01-01

Size:

3 pages

ISSN:

0167-577X

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.1105 / 530

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