Two-step Method for Etching Mc-Si Wafers: Fid-Bau Portal

Two-step Method for Etching Mc-Si Wafers

Lin, Y.-q. / Feng, S.-m. / Wang, K.-x. / Pei, J. / Liu, S.-j. / Liu, F.

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Two-step Method for Etching Mc-Si Wafers

Lin, Y.-q. / Feng, S.-m. / Wang, K.-x. / Pei, J. / Liu, S.-j. / Liu, F.

Two-step Method for Etching Mc-Si Wafers

Lin, Y.-q. / Feng, S.-m. / Wang, K.-x. / Pei, J. / Liu, S.-j. / Liu, F.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Two-step Method for Etching Mc-Si Wafers

Contributors:

Lin, Y.-q. (author) / Feng, S.-m. (author) / Wang, K.-x. (author) / Pei, J. (author) / Liu, S.-j. (author) / Liu, F. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING -HANGZHOU- ; 29 ; 707-710

Publication date:

2011-01-01

Size:

4 pages

ISSN:

1673-2812

Type of media:

Article (Journal)

Type of material:

Language:

Unknown

Classification:

DDC: 620.11

Nishimura, T. / Suzuki, H. / Satake, T. | British Library Online Contents | 1993

Microfabrication for Si wafers by FAB etching

Nishimura, T. / Suzuki, H. / Satake, T. | British Library Online Contents | 1993

Chemicodynamic Etching Method for Making Angle Laps in Semiconductor Wafers

Perevoshchikov, V. A. / Skupov, V. D. / Shengurov, V. G. | British Library Online Contents | 1996

Organic contamination of silicon wafers by buffered oxide etching

Beyer, M. / Budde, K. / Holzapfel, W. | British Library Online Contents | 1993

Techniques for Chemically Assisted Etching and Polishing of Semiconductor Wafers

Perevoshchikov, V. A. / Skupov, V. D. | British Library Online Contents | 1997