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A novel submicron-gap electrode fabrication technology using thermal oxidation

Chen, X. / Zhang, J. / Xu, H. / Hui, S. / Zhu, M.

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A novel submicron-gap electrode fabrication technology using thermal oxidation

Chen, X. / Zhang, J. / Xu, H. / Hui, S. / Zhu, M.

A novel submicron-gap electrode fabrication technology using thermal oxidation

Chen, X. / Zhang, J. / Xu, H. / Hui, S. / Zhu, M.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

A novel submicron-gap electrode fabrication technology using thermal oxidation

Contributors:

Chen, X. (author) / Zhang, J. (author) / Xu, H. (author) / Hui, S. (author) / Zhu, M. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING C MATERIALS FOR BIOLOGICAL APPLICATIONS ; 32 ; 369-374

Publication date:

2012-01-01

Size:

6 pages

ISSN:

0928-4931

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 572.05

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