A research on the technique for tungsten films by metal-organic chemical vapor deposition: Fid-Bau Portal

A research on the technique for tungsten films by metal-organic chemical vapor deposition

Yi, L. / Jinpu, L. / Chengchang, J.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

A research on the technique for tungsten films by metal-organic chemical vapor deposition

Yi, L. / Jinpu, L. / Chengchang, J.

A research on the technique for tungsten films by metal-organic chemical vapor deposition

Yi, L. / Jinpu, L. / Chengchang, J.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

A research on the technique for tungsten films by metal-organic chemical vapor deposition

Contributors:

Yi, L. (author) / Jinpu, L. (author) / Chengchang, J. (author)

Published in:

PM TECHNOLOGY -CHINA- ; 29 ; 334-338

Publication date:

2011-01-01

Size:

5 pages

ISSN:

1001-3784

Type of media:

Article (Journal)

Type of material:

Language:

Unknown

Classification:

DDC: 669

Si, J. / Desu, S. B. | British Library Online Contents | 1993

Metal organic chemical vapor deposition growth of Cd1-xFexSe thin films

Ju, Z. G. / Lu, Y. M. / Zhang, J. Y. et al. | British Library Online Contents | 2008

Sn doping in thermoelectric Bi2Te3 films by metal-organic chemical vapor deposition

Kim, Kwang-Chon / Kwon, Beomjin / Kim, Hyun Jae et al. | British Library Online Contents | 2015

Tungsten Nitride Deposition by Thermal Chemical Vapor Deposition as Barrier Metal for Cu Interconnection

Gonohe, N. | British Library Online Contents | 2002

Metal-organic chemical vapor deposition growth of GaN

Lu, D.-C. / Wang, D. / Wang, X. et al. | British Library Online Contents | 1995