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    Metal-assisted electroless etching of silicon in aqueous NH4HF2 solution

    New search for: Brahiti, N.
    New search for: Bouanik, S. A.
    New search for: Hadjersi, T.

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    Metal-assisted electroless etching of silicon in aqueous NH4HF2 solution

    New search for: Brahiti, N.
    New search for: Bouanik, S. A.
    New search for: Hadjersi, T.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Metal-assisted electroless etching of silicon in aqueous NH4HF2 solution

    New search for: Brahiti, N.
    New search for: Bouanik, S. A.
    New search for: Hadjersi, T.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
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    Document information
    Similar titles

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    Document information
    Title:

    Metal-assisted electroless etching of silicon in aqueous NH4HF2 solution

    Contributors:

    Brahiti, N. (author) / Bouanik, S. A. (author) / Hadjersi, T. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 258 ; 5628-5637

    Publication date:

    2012-01-01

    Size:

    10 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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