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Au-assisted electroless etching of silicon in aqueous HF/H2O2 solution

Megouda, N. / Hadjersi, T. / Piret, G. / Boukherroub, R. / Elkechai, O.

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Au-assisted electroless etching of silicon in aqueous HF/H2O2 solution

Megouda, N. / Hadjersi, T. / Piret, G. / Boukherroub, R. / Elkechai, O.

Au-assisted electroless etching of silicon in aqueous HF/H2O2 solution

Megouda, N. / Hadjersi, T. / Piret, G. / Boukherroub, R. / Elkechai, O.

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Document information

Title:

Au-assisted electroless etching of silicon in aqueous HF/H2O2 solution

Contributors:

Megouda, N. (author) / Hadjersi, T. (author) / Piret, G. (author) / Boukherroub, R. (author) / Elkechai, O. (author)

Published in:

APPLIED SURFACE SCIENCE ; 255 ; 6210-6216

Publication date:

2009-01-01

Size:

7 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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