Selective Epitaxial Growth of Silicon Carbide on Patterned Silicon Substrates Using Hexachlorodisilane and Propane

Jacob, C. / Hong, M.-H. / Chung, J. et al. | British Library Online Contents | 2000

Selective formation of silicon nanowires on pre-patterned substrates

Wan, L. / Gong, W. / Jiang, K. et al. | British Library Online Contents | 2009

Effect of Substrates Thermal Etching on CVD Growth of Epitaxial Silicon Carbide Layers

Strupinski, W. / Kosciewicz, K. / Weyher, J. et al. | British Library Online Contents | 2009

Lithographically patterned silicon nanostructures on silicon substrates

Megouda, N. / Piret, G. / Galopin, E. et al. | British Library Online Contents | 2012

Silicon Carbide Substrates for Epitaxial Growth of Aluminium Nitride by Chloride-Transport Process

Avrov, D. D. / Dorozhkin, S. I. / Lebedev, A. O. et al. | British Library Online Contents | 2000