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Ga-doped ZnO films deposited with varying sputtering powers and substrate temperatures by pulsed DC magnetron sputtering and their property improvement potentials
Ga-doped ZnO films deposited with varying sputtering powers and substrate temperatures by pulsed DC magnetron sputtering and their property improvement potentials
Ga-doped ZnO films deposited with varying sputtering powers and substrate temperatures by pulsed DC magnetron sputtering and their property improvement potentials
Lee, S. (author) / Cheon, D. (author) / Kim, W. J. (author) / Ham, M. H. (author) / Lee, W. (author)
APPLIED SURFACE SCIENCE ; 258 ; 6537-6544
2012-01-01
8 pages
Article (Journal)
English
DDC:
621.35
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