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Enhanced uniformity and durability of antisticking layer in imprinting stamps
Enhanced uniformity and durability of antisticking layer in imprinting stamps
Enhanced uniformity and durability of antisticking layer in imprinting stamps
Lee, M. J. (author) / Cho, S. U. (author) / Lee, S. M. (author) / Kim, C. S. (author) / Jeong, M. Y. (author)
APPLIED SURFACE SCIENCE ; 258 ; 6545-6549
2012-01-01
5 pages
Article (Journal)
English
DDC:
621.35
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