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    Preparation of amorphous carbon nitride films from toluene and nitrogen by rf-PECVD

    New search for: Aono, M.
    New search for: Yamaguchi, K.
    New search for: Kitazawa, N.
    New search for: Watanabe, Y.

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    Preparation of amorphous carbon nitride films from toluene and nitrogen by rf-PECVD

    New search for: Aono, M.
    New search for: Yamaguchi, K.
    New search for: Kitazawa, N.
    New search for: Watanabe, Y.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Preparation of amorphous carbon nitride films from toluene and nitrogen by rf-PECVD

    New search for: Aono, M.
    New search for: Yamaguchi, K.
    New search for: Kitazawa, N.
    New search for: Watanabe, Y.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
    Similar titles

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    Document information
    Title:

    Preparation of amorphous carbon nitride films from toluene and nitrogen by rf-PECVD

    Contributors:

    Aono, M. (author) / Yamaguchi, K. (author) / Kitazawa, N. (author) / Watanabe, Y. (author)

    Published in:

    MATERIALS SCIENCE AND TECHNOLOGY -LONDON- ; 20 ; 1119-1122

    Publication date:

    2004-01-01

    Size:

    4 pages

    ISSN:

    0267-0836

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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