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New Isolation Optimization Method of RF MEMS Capacitive Switches

Chen, J.S. / You, Z. / Ruan, Y. / Hu, M.Z.

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New Isolation Optimization Method of RF MEMS Capacitive Switches

Chen, J.S. / You, Z. / Ruan, Y. / Hu, M.Z.

New Isolation Optimization Method of RF MEMS Capacitive Switches

Chen, J.S. / You, Z. / Ruan, Y. / Hu, M.Z.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

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Document information

Title:

New Isolation Optimization Method of RF MEMS Capacitive Switches

Contributors:

Chen, J.S. (author) / You, Z. (author) / Ruan, Y. (author) / Hu, M.Z. (author) / Wang, X.

Published in:

Micro-Nano Technology XIII Selected, peer reviewed papers from the 13th Annual Conference of Chinese Society of Micro-Nano Technology, September 28-30, 2011, Changchow, China ; 35-42

KEY ENGINEERING MATERIALS ; 503

Publication date:

2012-01-01

Size:

8 pages

ISSN:

1013-9826

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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