MEMS Grating with Interdigitated-Comb Structure: Fid-Bau Portal

MEMS Grating with Interdigitated-Comb Structure

Zhang, H. / Yao, J. / Tao, F.G. / Zhuang, X.Y.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

MEMS Grating with Interdigitated-Comb Structure

Zhang, H. / Yao, J. / Tao, F.G. / Zhuang, X.Y.

MEMS Grating with Interdigitated-Comb Structure

Zhang, H. / Yao, J. / Tao, F.G. / Zhuang, X.Y.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

MEMS Grating with Interdigitated-Comb Structure

Contributors:

Zhang, H. (author) / Yao, J. (author) / Tao, F.G. (author) / Zhuang, X.Y. (author) / Wang, X.

Published in:

Micro-Nano Technology XIII Selected, peer reviewed papers from the 13th Annual Conference of Chinese Society of Micro-Nano Technology, September 28-30, 2011, Changchow, China ; 49-54

KEY ENGINEERING MATERIALS ; 503

Publication date:

2012-01-01

Size:

6 pages

ISSN:

1013-9826

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

Similar titles

Gap Adjustable MEMS Comb Resonator

Pu, X. / Li, W.H. / Zhou, Z.F. et al. | British Library Online Contents | 2013

Interdigitated cellular cushioning

KANOUS TREVOR / FOLEY PETER M / METZER COLLIN et al. | European Patent Office | 2019

Free access

INTERDIGITATED CELLULAR CUSHIONING

KANOUS TREVOR / FOLEY PETER / METZER COLLIN et al. | European Patent Office | 2018

Free access

DESIGN OF A TWO-AXIS MEMS SENSOR FOR MEASURING THE FORCE AND TORQUE WITH COMB STRUCTURE

WANG ShuQin / WANG BiDou / LV DanHui et al. | DOAJ | 2018

Free access

Piezoelectric Fiber Composites with Interdigitated Electrodes

Bent, A. A. / Hagood, N. W. | British Library Online Contents | 1997