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Gap Adjustable MEMS Comb Resonator
Gap Adjustable MEMS Comb Resonator
Gap Adjustable MEMS Comb Resonator
Pu, X. (author) / Li, W.H. (author) / Zhou, Z.F. (author) / Huang, Q.G. (author) / Tang, F.
2013-01-01
6 pages
Article (Journal)
English
DDC:
620.11
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