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Thermal conductivity of AlN thin films deposited by RF magnetron sputtering

Park, M. H. / Kim, S. H.

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Thermal conductivity of AlN thin films deposited by RF magnetron sputtering

Park, M. H. / Kim, S. H.

Thermal conductivity of AlN thin films deposited by RF magnetron sputtering

Park, M. H. / Kim, S. H.

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Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Thermal conductivity of AlN thin films deposited by RF magnetron sputtering

Contributors:

Park, M. H. (author) / Kim, S. H. (author)

Published in:

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 15 ; 6-10

Publication date:

2012-01-01

Size:

5 pages

ISSN:

1369-8001

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.38152

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