Effects of Surface Morphological Defects and Crystallographic Defects on Reliability of Thermal Oxides on C-Face: Fid-Bau Portal

Effects of Surface Morphological Defects and Crystallographic Defects on Reliability of Thermal Oxides on C-Face

Suzuki, T. / Yamaguchi, H. / Hatakeyama, T. / Matsuhata, H. / Senzaki, J. / Fukuda, K. / Shinohe, T. / Okumura, H.

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Effects of Surface Morphological Defects and Crystallographic Defects on Reliability of Thermal Oxides on C-Face

Suzuki, T. / Yamaguchi, H. / Hatakeyama, T. / Matsuhata, H. / Senzaki, J. / Fukuda, K. / Shinohe, T. / Okumura, H.

Effects of Surface Morphological Defects and Crystallographic Defects on Reliability of Thermal Oxides on C-Face

Suzuki, T. / Yamaguchi, H. / Hatakeyama, T. / Matsuhata, H. / Senzaki, J. / Fukuda, K. / Shinohe, T. / Okumura, H.

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Title:

Effects of Surface Morphological Defects and Crystallographic Defects on Reliability of Thermal Oxides on C-Face

Contributors:

Suzuki, T. (author) / Yamaguchi, H. (author) / Hatakeyama, T. (author) / Matsuhata, H. (author) / Senzaki, J. (author) / Fukuda, K. (author) / Shinohe, T. (author) / Okumura, H. (author)

Published in:

MATERIALS SCIENCE FORUM ; 717/720 ; 789-792

Publication date:

2012-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

Hatakeyama, T. / Ichinoseki, K. / Yamaguchi, H. et al. | British Library Online Contents | 2012

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Dasilva, Y.A.R. / Ruterana, P. / Lahourcade, L. et al. | British Library Online Contents | 2010

Defects and Transport in Oxides

Seltzer, Martin S. | TIBKAT | 1974

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Michel, D. / Mazerolles, L. / Gaffet, E. | British Library Online Contents | 1997