Crystallographic Defects under Surface Morphological Defects of 4H-SiC Homoepitaxial Films: Fid-Bau Portal

Crystallographic Defects under Surface Morphological Defects of 4H-SiC Homoepitaxial Films

Okada, T. / Kimoto, T. / Yamai, K. / Matsunami, H. / Inoko, F.

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Crystallographic Defects under Surface Morphological Defects of 4H-SiC Homoepitaxial Films

Okada, T. / Kimoto, T. / Yamai, K. / Matsunami, H. / Inoko, F.

Crystallographic Defects under Surface Morphological Defects of 4H-SiC Homoepitaxial Films

Okada, T. / Kimoto, T. / Yamai, K. / Matsunami, H. / Inoko, F.

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Access via TIB

Check availability in my library

Order at Subito €

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Document information

Title:

Crystallographic Defects under Surface Morphological Defects of 4H-SiC Homoepitaxial Films

Contributors:

Okada, T. (author) / Kimoto, T. (author) / Yamai, K. (author) / Matsunami, H. (author) / Inoko, F. (author)

Published in:

MATERIALS SCIENCE FORUM ; 457/460 ; 521-524

Publication date:

2004-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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