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Local Anodic Oxidation of Phosphorus-Implanted 4H-SiC by Atomic Force Microscopy

Lee, J.H. / Ahn, J.J. / Hallen, A. / Zetterling, C.M. / Koo, S.M.

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Local Anodic Oxidation of Phosphorus-Implanted 4H-SiC by Atomic Force Microscopy

Lee, J.H. / Ahn, J.J. / Hallen, A. / Zetterling, C.M. / Koo, S.M.

Local Anodic Oxidation of Phosphorus-Implanted 4H-SiC by Atomic Force Microscopy

Lee, J.H. / Ahn, J.J. / Hallen, A. / Zetterling, C.M. / Koo, S.M.

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Check availability in my library

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Document information

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Document information

Title:

Local Anodic Oxidation of Phosphorus-Implanted 4H-SiC by Atomic Force Microscopy

Contributors:

Lee, J.H. (author) / Ahn, J.J. (author) / Hallen, A. (author) / Zetterling, C.M. (author) / Koo, S.M. (author)

Published in:

MATERIALS SCIENCE FORUM ; 717/720 ; 905-910

Publication date:

2012-01-01

Size:

6 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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