Fachinformationsdienst BAUdigital

A platform for research: civil engineering, architecture and urbanism

    CW laser induced crystallization of thin amorphous silicon films deposited by EBE and PECVD

    New search for: Said-Bacar, Z.
    New search for: Prathap, P.
    New search for: Cayron, C.
    New search for: Mermet, F.
    New search for: Leroy, Y.
    New search for: Antoni, F.
    New search for: Slaoui, A.
    New search for: Fogarassy, E.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    CW laser induced crystallization of thin amorphous silicon films deposited by EBE and PECVD

    New search for: Said-Bacar, Z.
    New search for: Prathap, P.
    New search for: Cayron, C.
    New search for: Mermet, F.
    New search for: Leroy, Y.
    New search for: Antoni, F.
    New search for: Slaoui, A.
    New search for: Fogarassy, E.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    CW laser induced crystallization of thin amorphous silicon films deposited by EBE and PECVD

    New search for: Said-Bacar, Z.
    New search for: Prathap, P.
    New search for: Cayron, C.
    New search for: Mermet, F.
    New search for: Leroy, Y.
    New search for: Antoni, F.
    New search for: Slaoui, A.
    New search for: Fogarassy, E.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    CW laser induced crystallization of thin amorphous silicon films deposited by EBE and PECVD

    Contributors:

    Said-Bacar, Z. (author) / Prathap, P. (author) / Cayron, C. (author) / Mermet, F. (author) / Leroy, Y. (author) / Antoni, F. (author) / Slaoui, A. (author) / Fogarassy, E. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 258 ; 9359-9365

    Publication date:

    2012-01-01

    Size:

    7 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

    Similar titles

    Laser annealing study of PECVD deposited hydrogenated amorphous silicon carbon alloy films

    Coscia, U. / Ambrosone, G. / Gesuele, F. et al. | British Library Online Contents | 2007

    AlCl3-induced crystallization of amorphous silicon thin films

    Qi, J. / He, D. | British Library Online Contents | 2008

    Electron beam induced crystallization of sputter deposited amorphous alumina thin films

    Murray, J. / Song, K. / Huebner, W. et al. | British Library Online Contents | 2012

    Sputtered amorphous silicon thin films for diode laser crystallization

    Schmidl, G. / Andra, G. / Bergmann, J. et al. | British Library Online Contents | 2012

    Polycrystalline silicon thin films by aluminum induced crystallization of amorphous silicon

    Wang, T. / Yan, H. / Zhang, M. et al. | British Library Online Contents | 2013

    Back to top