Noncontact Figuring of Millimeter-Thick Elliptical Mirror Substrate by Numerically Controlled Local Wet Etching: Fid-Bau Portal

Noncontact Figuring of Millimeter-Thick Elliptical Mirror Substrate by Numerically Controlled Local Wet Etching

Nagano, M. / Yamaga, F. / Yamazaki, D. / Maruyama, R. / Soyama, K. / Yamamura, K.

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Noncontact Figuring of Millimeter-Thick Elliptical Mirror Substrate by Numerically Controlled Local Wet Etching

Nagano, M. / Yamaga, F. / Yamazaki, D. / Maruyama, R. / Soyama, K. / Yamamura, K.

Noncontact Figuring of Millimeter-Thick Elliptical Mirror Substrate by Numerically Controlled Local Wet Etching

Nagano, M. / Yamaga, F. / Yamazaki, D. / Maruyama, R. / Soyama, K. / Yamamura, K.

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Check availability in my library

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Document information

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Document information

Title:

Noncontact Figuring of Millimeter-Thick Elliptical Mirror Substrate by Numerically Controlled Local Wet Etching

Contributors:

Nagano, M. (author) / Yamaga, F. (author) / Yamazaki, D. (author) / Maruyama, R. (author) / Soyama, K. (author) / Yamamura, K. (author)

Published in:

KEY ENGINEERING MATERIALS ; 516 ; 361-366

Publication date:

2012-01-01

Size:

6 pages

ISSN:

1013-9826

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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